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Spritz Fluxus Auratus Auroalis Perfectus-R

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)
Auratus Auroalis

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-A Torridus

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Product Technology

Thermal ALD

PEALD|Plasma Enhanced Atomic Layer Deposition

EPI | SiGe Epitaxy Systems

PECVD|Plasma Enhanced Chemical Vapor Deposition

SiC EPI|Silicon Carbide Epitaxy

ALE|Selective Etch
Spritz Fluxus

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors
Auratus

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-R Perfectus-A

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS
Auroalis

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Torridus

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Elegito

Elegito

Selective Etch

Market Applications

  • Logic
  • DRAM
  • NAND
  • Wide-Bandgap Semiconductors (WBG)
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Exhibitions

Exhibitions

all 2025 2024

SEMICON CHINA

Global Innovation · Connected Progress | PSR Concludes SEMICON China 2025

time：March 26-28, 2025 Booth：PSR Booth: N1607 (Hall N1)

Place：China Shanghai (Shanghai New International Expo Center)

SEMICON CHINA

SEMICON CHINA 2025 Pioneer Invitation Letter

time：March 26-28, 2025 Booth：Pioneer Booth: N1607 (Hall N1)

Place：China Shanghai (Shanghai New International Expo Center)

CSEAC China Semiconductor Equipment Annual Conference

CSEAC China Semiconductor Equipment Annual Conference

time：September 3-5, 2025 Booth：PSR Booth A1-66 (Hall A1)

Place：Wuxi, China (Wuxi Taihu International Expo Center)

SEMiBAY

SEMiBAY

time：2025年10月15日-17日 Booth：PSR Booth: 1N06 (Hall 1)

Place：Shenzhen, China (Shenzhen Convention & Exhibition Center - Futian)

SEMiBAY Bay Core Exhibition

Exhibition Review | Pioneer Semiconductor debuts at the first "Bay Core Exhibition" SEMiBAY perfectly concluded

time：October 16-18, 2024 Booth：Pioneer booth: 1L29 (Hall 1)

Place：Shenzhen Convention and Exhibition Center (No. 111, Fuhua Third Road)

SEMiBAY Bay Core Exhibition

Walking with "Sinc" | Pioneer invites you to participate in the SEMiBAY Bay Core Exhibition

time：October 16-18, 2024 Booth：Yanwei Booth: 1L29 (Hall 1)

Place：Shenzhen Convention and Exhibition Center (No. 111, Fuhua Third Road)
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