Home
About PSR

Company Profile

Corporate Culture

Certifications & Honors

Development Milestones

Social Responsibility
Market Applications

Semiconductor Chip Manufacturing

Advanced Packaging

Specialty Processes

Research & Custom Solutions
Spritz Fluxus Auratus Auroalis Perfectus-R

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)
Auratus Auroalis

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-A Torridus

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Product Technology

Thermal ALD

PEALD|Plasma Enhanced Atomic Layer Deposition

EPI | SiGe Epitaxy Systems

PECVD|Plasma Enhanced Chemical Vapor Deposition

SiC EPI|Silicon Carbide Epitaxy

ALE|Selective Etch
Spritz Fluxus

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors
Auratus

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-R Perfectus-A

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS
Auroalis

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Torridus

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Elegito

Elegito

Selective Etch

Market Applications

  • Logic
  • DRAM
  • NAND
  • Wide-Bandgap Semiconductors (WBG)
Parts & Services

Service Support

Global Service Network
News

News

Exhibitions
Careers at PSR

Join PSR

Talent Philosophy

Competitive Compensation
Contact PSR

Contact PSR

Customer Portal

Supplier Portal
EN
EN 中文
EN CH
Home
About PSR
Market Applications
Product Technology
Parts & Services
News
Careers at PSR
Contact PSR
News
Exhibitions

Exhibitions

all 2025 2024

SEMICON CHINA

Global Innovation · Connected Progress | PSR Concludes SEMICON China 2025

time：March 26-28, 2025 Booth：PSR Booth: N1607 (Hall N1)

Place：China Shanghai (Shanghai New International Expo Center)

SEMICON CHINA

SEMICON CHINA 2025 Pioneer Invitation Letter

time：March 26-28, 2025 Booth：Pioneer Booth: N1607 (Hall N1)

Place：China Shanghai (Shanghai New International Expo Center)

CSEAC China Semiconductor Equipment Annual Conference

CSEAC China Semiconductor Equipment Annual Conference

time：September 3-5, 2025 Booth：PSR Booth A1-66 (Hall A1)

Place：Wuxi, China (Wuxi Taihu International Expo Center)

SEMiBAY

SEMiBAY

time：2025年10月15日-17日 Booth：PSR Booth: 1N06 (Hall 1)

Place：Shenzhen, China (Shenzhen Convention & Exhibition Center - Futian)