Market Applications
Product Technology
EN CH

Elegito

Selective Etch

Elegito uses Atomic Layer Etching (ALE), an etching technology that allows for excellent depth control of shallower microstructures. As device microstructure sizes become smaller and smaller, higher device performance can be achieved through the precision of ALE technology.

Market Applications

  • Logic
  • DRAM
  • NAND
  • Wide-Bandgap Semiconductors (WBG)

Key Advantages

Excellent uniformity, high selectivity and low particle

Simulation-based thermal and flow field design

Software design focusing on human-computer interaction experience

Unified platform for multiple products, reducing learning and maintenance costs