Selective Etch
Elegito uses Atomic Layer Etching(ALE),an etching technology that allows for excellent depth control of shallower microstructures.As device microstructure sizes become smaller and smaller,higher device performance can be achieved through the precision of ALE technology.
Excellent uniformity,high selectivity and low particle;
Simulation-based thermal and flow field design;
Software design focusing on human-computer interaction experience;
Unified platform for multiple products,reducing learning and maintenance costs.
