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Semiconductor chip Fabrication

Semiconductor Advaced Packaging

Semiconductor Specialty Processes

Scientific Research Equipment And Others
Spritz Series Fluxus Series Auratus Series Auroalis Series Perfectus-R Series

Spritz Series

Shower Head tALD Thermal Atomic Layer Deposition

Market application

  • Logic HKMG
  • DRAM bWL, SN area filling
  • NAND WL
  • CIS
  • DTC
  • MIM

Fluxus Series

Cross Flow Thermal Atomic Layer Deposition

Market application

  • Logic FEOL High-k/Dipole
  • DRAM Peri High-k
  • CIS
  • MIM

Auratus Series

Plasma Enhanced Atomic Layer Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS

Auroalis Series

Plasma Enhanced Chemical Vapor Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS

Perfectus-R Series

Reduced Pressure Silicon Epitaxy

Market application

  • NMOS/PMOS/Channel si/Channel siGe/pure Ge required for high-end chips
Auratus Series Auroalis Series

Auratus Series

Plasma Enhanced Atomic Layer Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS

Auroalis Series

Plasma Enhanced Chemical Vapor Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS
Perfectus-A Series Torridus Series

Perfectus-A Series

Atmospheric Pressure Silicon Epitaxy

Market application

  • Silicon wafer epitaxial layer
  • Power devices
  • CIS Sensor
  • MEMS

Torridus Series

Silicon Carbide Epitaxy

Market application

  • Energy storage
  • Charging pile
  • Photovoltaic
  • Photovoltaic
  • New energy vehicles
Products

Thermal ALD|Thermal Atomic Layer Deposition

PEALD| Plasma Enhanced Atomic Layer Deposition

EPI| Silicon Carbide Epitaxy

PECVD| Plasma Enhanced Chemical Vapor Deposition

SiC EPI| Silicon Carbide Epitaxy

ALE| Selective Etch
Spritz Series Fluxus Series

Spritz Series

Shower Head tALD Thermal Atomic Layer Deposition

Market application

  • Logic HKMG
  • DRAM bWL, SN area filling
  • NAND WL
  • CIS
  • DTC
  • MIM

Fluxus Series

Cross Flow Thermal Atomic Layer Deposition

Market application

  • Logic FEOL High-k/Dipole
  • DRAM Peri High-k
  • CIS
  • MIM
Auratus Series

Auratus Series

Plasma Enhanced Atomic Layer Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS
Perfectus-R Series Perfectus-A Series

Perfectus-R Series

Reduced Pressure Silicon Epitaxy

Market application

  • NMOS/PMOS/Channel si/Channel siGe/pure Ge required for high-end chips

Perfectus-A Series

Atmospheric Pressure Silicon Epitaxy

Market application

  • Silicon wafer epitaxial layer
  • Power devices
  • CIS Sensor
  • MEMS
Auroalis Series

Auroalis Series

Plasma Enhanced Chemical Vapor Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS
Torridus Series

Torridus Series

Silicon Carbide Epitaxy

Market application

  • Energy storage
  • Charging pile
  • Photovoltaic
  • Photovoltaic
  • New energy vehicles
Elegito Series

Elegito Series

Selective Etch

Market application

  • Logic
  • DRAM
  • NAND
  • Third generation semiconductors
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Market Application

Semiconductor chip Fabrication
- Spritz Series - Fluxus Series - Auratus Series - Auroalis Series - Perfectus-R Series
Semiconductor Advaced Packaging
- Auratus Series - Auroalis Series
Semiconductor Specialty Processes
- Perfectus-A Series - Torridus Series
Scientific Research Equipment And Others
Semiconductor chip Fabrication
Semiconductor Advaced Packaging
Semiconductor Specialty Processes
Scientific Research Equipment And Others

Product Catalog

Scientific Research Equipment And Others

Pioneer provides personalized customized services to universities and research institutions