Market Applications：NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS); Strained SiGe (for PMOS); Pure Ge (Emerging Channel)
Product Catalog
PSR's self-developed equipment addresses requirements for both advanced process nodes and specialty semiconductor technologies
Reduced Pressure Silicon Epitaxy
Market Applications：NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS); Strained SiGe (for PMOS); Pure Ge (Emerging Channel)
Atmospheric Pressure Silicon Epitaxy
Market Applications：Wafer Epitaxy; Power Devices; CIS (CMOS Image Sensors); MEMS
