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Market Application

Semiconductor chip Fabrication

Semiconductor Advaced Packaging

Semiconductor Specialty Processes

Scientific Research Equipment And Others
Spritz Series Fluxus Series Auratus Series Auroalis Series Perfectus-R Series

Spritz Series

Shower Head tALD Thermal Atomic Layer Deposition

Market application

  • Logic HKMG
  • DRAM bWL, SN area filling
  • NAND WL
  • CIS
  • DTC
  • MIM

Fluxus Series

Cross Flow Thermal Atomic Layer Deposition

Market application

  • Logic FEOL High-k/Dipole
  • DRAM Peri High-k
  • CIS
  • MIM

Auratus Series

Plasma Enhanced Atomic Layer Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS

Auroalis Series

Plasma Enhanced Chemical Vapor Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS

Perfectus-R Series

Reduced Pressure Silicon Epitaxy

Market application

  • NMOS/PMOS/Channel si/Channel siGe/pure Ge required for high-end chips
Auratus Series Auroalis Series

Auratus Series

Plasma Enhanced Atomic Layer Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS

Auroalis Series

Plasma Enhanced Chemical Vapor Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS
Perfectus-A Series Torridus Series

Perfectus-A Series

Atmospheric Pressure Silicon Epitaxy

Market application

  • Silicon wafer epitaxial layer
  • Power devices
  • CIS Sensor
  • MEMS

Torridus Series

Silicon Carbide Epitaxy

Market application

  • Energy storage
  • Charging pile
  • Photovoltaic
  • Photovoltaic
  • New energy vehicles
Products

Thermal ALD|Thermal Atomic Layer Deposition

PEALD| Plasma Enhanced Atomic Layer Deposition

EPI| Silicon Carbide Epitaxy

PECVD| Plasma Enhanced Chemical Vapor Deposition

SiC EPI| Silicon Carbide Epitaxy

ALE| Selective Etch
Spritz Series Fluxus Series

Spritz Series

Shower Head tALD Thermal Atomic Layer Deposition

Market application

  • Logic HKMG
  • DRAM bWL, SN area filling
  • NAND WL
  • CIS
  • DTC
  • MIM

Fluxus Series

Cross Flow Thermal Atomic Layer Deposition

Market application

  • Logic FEOL High-k/Dipole
  • DRAM Peri High-k
  • CIS
  • MIM
Auratus Series

Auratus Series

Plasma Enhanced Atomic Layer Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS
Perfectus-R Series Perfectus-A Series

Perfectus-R Series

Reduced Pressure Silicon Epitaxy

Market application

  • NMOS/PMOS/Channel si/Channel siGe/pure Ge required for high-end chips

Perfectus-A Series

Atmospheric Pressure Silicon Epitaxy

Market application

  • Silicon wafer epitaxial layer
  • Power devices
  • CIS Sensor
  • MEMS
Auroalis Series

Auroalis Series

Plasma Enhanced Chemical Vapor Deposition

Market application

  • Logic
  • DRAM
  • 3D NAND
  • Semiconductor Advaced Packaging
  • CIS
Torridus Series

Torridus Series

Silicon Carbide Epitaxy

Market application

  • Energy storage
  • Charging pile
  • Photovoltaic
  • Photovoltaic
  • New energy vehicles
Elegito Series

Elegito Series

Selective Etch

Market application

  • Logic
  • DRAM
  • NAND
  • Third generation semiconductors
Services

Service Support

Service Network
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News

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Front desk phone number0510-83557707 Media Contactpr@psrsemi.com Investor Relationsir@psrsemi.com
Production address
No. 18, Datong Road, Economic Development Zone,Wuxi City, Jiangsu Province		 Office address
22F,Building 1,the Taihu Lake Bay Information Technology Industrial Park, No.688,Zhenze Road,Wuxi Economic Development Zone,Jiangsu Province

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