Silicon Carbide Epitaxy
Torridus SiC EPI system,equipped with the innovative hardware and intelligent control system independently developed by PSR: Exsequi,which is the core process of manufacturing the third- generation semiconductor silicon carbide chips-homoepitaxy of silicon carbide.The system is compatible with 6-inch and 8- inch wafers and is a silicon carbide epitaxial growth equipment with excellent process performance,low maintenance frequency and high production capacity.
Increase production capacity by 1.2 to 1.4,with a lower CoO;
Optimized chamber design to meet performance requirements such as the wafer uniformity of thickness and doping,and the adjustability from the middle region to the edge region;
Top-level machine stability,reliability and safety:Multi-level hardware and software safety interlock;
Excellent software operating system and intelligent data analysis platform,the world's top process/hardware customer service team;
The 8-inch equipment is compatible with 6-inch,providing a complete process and design solution.
