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Spritz Fluxus Auratus Auroalis Perfectus-R

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)
Auratus Auroalis

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-A Torridus

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Product Technology

Thermal ALD

PEALD|Plasma Enhanced Atomic Layer Deposition

EPI | SiGe Epitaxy Systems

PECVD|Plasma Enhanced Chemical Vapor Deposition

SiC EPI|Silicon Carbide Epitaxy

ALE|Selective Etch
Spritz Fluxus

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors
Auratus

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-R Perfectus-A

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS
Auroalis

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Torridus

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Elegito

Elegito

Selective Etch

Market Applications

  • Logic
  • DRAM
  • NAND
  • Wide-Bandgap Semiconductors (WBG)
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Product Technology

Thermal ALD
- Spritz - Fluxus
PEALD|Plasma Enhanced Atomic Layer Deposition
- Auratus
EPI | SiGe Epitaxy Systems
- Perfectus-R - Perfectus-A
PECVD|Plasma Enhanced Chemical Vapor Deposition
- Auroalis
SiC EPI|Silicon Carbide Epitaxy
- Torridus
ALE|Selective Etch
- Elegito
Thermal ALD
PEALD|Plasma Enhanced Atomic Layer Deposition
EPI | SiGe Epitaxy Systems
PECVD|Plasma Enhanced Chemical Vapor Deposition
SiC EPI|Silicon Carbide Epitaxy
ALE|Selective Etch

Product Catalog

ALE|Selective Etch

PSR's self-developed equipment addresses requirements for both advanced process nodes and specialty semiconductor technologies

Elegito

Selective Etch

Market Applications：Logic；DRAM；NAND；Wide-Bandgap Semiconductors (WBG)

Product details