Dual-chamber design,with a through-put that is twice that of similar products in the industry;

Mounted on the high-capacity dual-chamber Celeritas-8 platform to meet the high through-put requirements of DCM;

The intelligent Exsequi software platform enables equipment fingerprint collection,monitoring and early warning,SPC and Trend Log correlation analysis;

The precursor delivery system utilizes the industry's most advanced solid source delivery system,effectively improving the stability of reaction source transport;

Through DOE,it can achieve industry-leading film uniformity, metal contamination,impurity levels,step coverage,and device performance;

Key chamber components have undergone key surface ehancement,extending the reaction chamber's lifespan to an industry-leading level.