Spritz

Market Applications

• High-k/Metal Gate (HKMG)
• Buried Word Line (bWL), Storage Node (SN) Gapfill
• Word Line (WL)
• CMOS Image Sensors
• Deep Trench Capacitor (DTC)
• Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Market Applications

• High-k / Dipole Layer Engineering
• High-k Dielectric Integration
• CMOS Image Sensor Fabrication
• Metal-Insulator-Metal (MIM) Capacitors

Auratus

Market Applications

• Logic
• DRAM
• 3D NAND
• Advanced Packaging
• CIS (CMOS Image Sensors)

Auroalis

Market Applications

• Logic
• DRAM
• 3D NAND
• Advanced Packaging
• CIS (CMOS Image Sensors)

Perfectus-R

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)