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Spritz Fluxus Auratus Auroalis Perfectus-R

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)
Auratus Auroalis

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-A Torridus

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Product Technology

Thermal ALD

PEALD|Plasma Enhanced Atomic Layer Deposition

EPI | SiGe Epitaxy Systems

PECVD|Plasma Enhanced Chemical Vapor Deposition

SiC EPI|Silicon Carbide Epitaxy

ALE|Selective Etch
Spritz Fluxus

Spritz

Showerhead Thermal Atomic Layer Deposition

Market Applications

  • High-k/Metal Gate (HKMG)
  • Buried Word Line (bWL), Storage Node (SN) Gapfill
  • Word Line (WL)
  • CMOS Image Sensors
  • Deep Trench Capacitor (DTC)
  • Metal-Insulator-Metal Capacitor (MIM)

Fluxus

Crossflow Thermal Atomic Layer Deposition

Market Applications

  • High-k / Dipole Layer Engineering
  • High-k Dielectric Integration
  • CMOS Image Sensor Fabrication
  • Metal-Insulator-Metal (MIM) Capacitors
Auratus

Auratus

Plasma Enhanced Atomic Layer Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Perfectus-R Perfectus-A

Perfectus-R

Reduced Pressure Silicon Epitaxy

Market Applications

NMOS: Si Channel / Strained SiGe Source-Drain; PMOS: Strained SiGe Channel / SiGe Source-Drain; Channel Materials:Pure Si (for NMOS);

Strained SiGe (for PMOS); Pure Ge (Emerging Channel)

Perfectus-A

Atmospheric Pressure Silicon Epitaxy

Market Applications

  • Wafer Epitaxy
  • Power Devices
  • CIS (CMOS Image Sensors)
  • MEMS
Auroalis

Auroalis

Plasma Enhanced Chemical Vapor Deposition

Market Applications

  • Logic
  • DRAM
  • 3D NAND
  • Advanced Packaging
  • CIS (CMOS Image Sensors)
Torridus

Torridus

Silicon Carbide Epitaxy

Market Applications

  • Energy Storage Systems (ESS)
  • EV Charging Infrastructure
  • Photovoltaics (PV)
  • Rail Transit Electrification
  • New Energy Vehicles (NEV)
Elegito

Elegito

Selective Etch

Market Applications

  • Logic
  • DRAM
  • NAND
  • Wide-Bandgap Semiconductors (WBG)
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Product Technology

Thermal ALD
- Spritz - Fluxus
PEALD|Plasma Enhanced Atomic Layer Deposition
- Auratus
EPI | SiGe Epitaxy Systems
- Perfectus-R - Perfectus-A
PECVD|Plasma Enhanced Chemical Vapor Deposition
- Auroalis
SiC EPI|Silicon Carbide Epitaxy
- Torridus
ALE|Selective Etch
- Elegito
Thermal ALD
PEALD|Plasma Enhanced Atomic Layer Deposition
EPI | SiGe Epitaxy Systems
PECVD|Plasma Enhanced Chemical Vapor Deposition
SiC EPI|Silicon Carbide Epitaxy
ALE|Selective Etch

Product Catalog

SiC EPI|Silicon Carbide Epitaxy

PSR's self-developed equipment addresses requirements for both advanced process nodes and specialty semiconductor technologies

Torridus

Silicon Carbide Epitaxy

Market Applications：Energy Storage Systems (ESS)；EV Charging Infrastructure；Photovoltaics (PV)；Rail Transit Electrification；New Energy Vehicles (NEV)

 

Product details