EN

January "double delivery"! Pioneer leads the new track of domestic replacement of semiconductor equipment!

Release time:2025.04.29

In April, the "core" tide in the Economic and Technological Development Zone was surging

Pioneer (Jiangsu) Semiconductor Technology Co., Ltd.

Independently developed plasma enhanced atomic layer deposition

(PEALD) Equipment Auratus

Within one month, delivery

Two leading companies in the domestic chip field!

With outstanding results

The journey of independent replacement of domestic semiconductor equipment

Set a new benchmark

○  On April 7, Auratus officially delivered to a leading domestic logic chip company, helping the company successfully "break the deadlock" in semiconductor multiple interlocking technology, effectively improving the uniformity and step coverage of the SiO dielectric layer in more advanced processes;

○  On April 29, the device once again delivered equipment to a leading advanced packaging chip company, providing an efficient solution for advanced packaging through-silicon (TSV) media filling for artificial intelligence HBM chips.

On the precision "stage" of chip manufacturing

Lithography, etching and deposition

It is hailed as the three core gold processes in the industry

They work together and connect

Like a tacit cooperation with the "iron triangle"

Continuous cycle in production process

Together, we will create high-quality chips

Among them, the film deposition equipment grows the required film on the wafer substrate surface. The lithography machine is responsible for accurately engraving the chip pattern on the film, and the etching equipment removes some materials that are not needed for the graphics. Pioneer Semiconductor is determined to overcome the film deposition technology difficulties in high-end chip manufacturing and drives the accelerated takeoff of China's semiconductor industry with advanced technology.

"Since the project was established in August 2023, we have achieved comprehensive coverage of three semiconductor sub-tracks, including logic, storage, and advanced packaging, and have achieved fruitful development results. Dr. Lin Xing, CEO of Pioneer Semiconductor, introduced that the PEALD equipment Auratus is widely used in the application of graphical products and dielectric film filling in the fields of high-end integrated circuits and advanced packaging. The advanced packaging equipment delivered this time adopts a compact reaction chamber design, and through multi-physics coordinated optimization (flow field, heat field, plasma distribution), it performs excellently in key indicators such as film density, step coverage, and batch stability, providing reliable technical guarantees for advanced packaging.

It fully covers three tracks of logic, storage, and advanced packaging in 18 months, and realizes the delivery of multi-type film equipment such as ThermalALD and PEALD in 30 months. Feng Li, president of SEMI China, commented: "Pioneer shows the amazing innovation speed of Chinese semiconductor equipment companies."

Dr. Lin Xing said that the company will focus on the research and development of high-end thin film deposition equipment and process technology, and work with industrial chain partners to provide complete solutions for semiconductor chip manufacturing equipment and processes, helping China's semiconductor chip industry chain achieve independent control.

AI graphics

The rapid development of Pioneer semiconductors

Inseparable from strong support from local governments

Invest more than 50 million yuan in "patience capital" to inject strong impetus into the development of the enterprise;

Actively match and promote industry-university-research cooperation between enterprises and Southeast University and other scientific research institutions;

As the "base camp" of enterprises, Taihuwan Information Park has gathered more than 60 integrated circuit companies to build an industrial ecosystem of "up and downstairs, up and downstreams", allowing enterprises to achieve resource sharing and collaborative innovation.

This is not only a technological breakthrough for the enterprise, but also a practical result of Wuxi's "Talent Special Zone" policy. Pioneer's "Returned Doctoral Group" brings cutting-edge international experience and technology back to China, inspiring unlimited innovation vitality. Today, the company has 5 national talents, and the R&D team accounts for more than 60%. In 2024, it won the title of "Double Innovation Team" in Jiangsu Province, and can be called a "gathering place for academic masters".

Source: Wuxi Economic Development Release

Reprinting and sharing are only for no commercial purpose, and the copyright of the pictures and texts belongs to the original author.

Pioneer (Jiangsu) Semiconductor Technology Co., Ltd. (referred to as "Pioneer Semiconductor") was established in 2022 and is located in Wuxi Economic Development Zone.

The company focuses on high-end ALD, PECVD and special epitaxial equipment technologies, and produces products with independent intellectual property rights and international competitiveness, covering Thermal ALD, PEALD, SI EPI, SiC EPI, PECVD, etc. The products are widely used in high-end integrated circuits, power devices, radio frequency components and advanced packaging fields.

The company's goal is to solve the problems of deposition and etching technology in high-end chip manufacturing, lead more advanced deposition and etching equipment technology, and at the same time, work closely with the upstream and downstream industrial chains to move forward, helping China's semiconductor industry accelerate its takeoff!